ASML has recently invited DRAM companies to make early reservations for extreme ultraviolet (EUV) lithography tools to avoid a repeat of early 2010, when immersion scanners saw constrained supply due to a sudden upsurge in demand, according to industry sources. Rexchip Electronics reportedly is the only Taiwan-based company to order one set, joining larger peers, the sources said.

Costs for EUV lithography systems hit as high as US$100 million per unit. Both Samsung Electronics and Hynix Semiconductor have placed orders for the tool paving the way for them to migrate to 20nm and below processes, the sources indicated.

Rexchip is expected to take delivery of its first EUV lithography system from ASML in 2012, the sources noted. The company is set to complete the conversion to 45nm by the end of 2010, and is gearing up to ramp chip production using 30nm-class in 2011.

Other major Taiwan-based DRAM companies, Nanya Technology and Inotera Memories, have said they are in no hurry to book EUV lithography equipment for advancing their technologies. Their technology partner Micron Technology has also not yet placed orders for the system with ASML, adopting a wait-and-see attitude.

Rexchip became a consolidated subsidiary of Elpida Memory in March 2009, after the Japan-based vendor raised its holdings in the company to more than 50%. Elpida now holds 64% of Rexchip shares.